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Spotlights

On many occasions in the past, progress in applied physics has been promoted by cross-disciplinary research and for this reason we believe that it is valuable to give readers a broad perspective on current research. Each month we will select and suggest a small number of articles with a high potential for capturing the interest of researchers in the applied physics community. We hope that Spotlights will provide opportunities to redirect readers beyond their usual interests.

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Latest spotlights

Synthesis of Pd/WO3 and Pt/WO3 composite particles by sonochemical reactions and evaluation of their photocatalytic performance

Kei Sato et al 2024 Jpn. J. Appl. Phys. 63 04SP76

In this study, precious metal/tungsten trioxide (WO3) composite particles in which palladium (Pd) and platinum (Pt) were loaded on WO3 particles were synthesized via the ultrasonic reduction method. The surface observation of the synthesized composite materials was performed and their photocatalytic performance under visible light irradiation was evaluated from the decomposition rate of methylene blue in aqueous solution. From the TEM image, it was found that the Pd/WO3 composite particles synthesized by the ultrasonic reduction method had a structure in which Pd nanoparticles were supported on WO3 particles. The photocatalytic performance of Pd/WO3 and Pt/WO3 increased with increasing contents of Pd and Pt. When synthesizing Pd(0.5 wt%)/WO3 particles by ultrasonic reduction method, the photocatalytic activity was improved by feeding Pd equivalent to 0.17 wt% per feed three times at regular time intervals, rather than by feeding 0.5 wt% of Pd at a time.

Superconducting Nb interconnects for Cryo-CMOS and superconducting digital logic applications

Hideaki Numata et al 2024 Jpn. J. Appl. Phys. 63 04SP73

A 100 nm wide superconducting niobium (Nb) interconnect was fabricated by a 300 mm wafer process for Cryo-CMOS and superconducting digital logic applications. A low pressure and long throw sputtering was adopted for the Nb deposition, resulting in good superconductivity of the 50 nm thick Nb film with a critical temperature (Tc) of 8.3 K. The interconnects had a titanium nitride (TiN)/Nb stack structure, and a double-layer hard mask was used for the dry etching process. The exposed area of Nb film was minimized to decrease the effects of plasma damage during fabrication and atmosphere. The developed 100 nm wide and 50 nm thick Nb interconnect showed good superconductivity with a Tc of 7.8 K and a critical current of 3.2 mA at 4.2 K. These results are promising for Cryo-CMOS and superconducting digital logic applications in the 4 K stage.

Ge-on-insulator fabrication based on Ge-on-nothing technology

Keisuke Yamamoto et al 2024 Jpn. J. Appl. Phys. 63 04SP32

Ge-on-Insulator (GOI) is considered to be a necessary structure for novel Ge-based devices. This paper proposes an alternative approach for fabricating GOI based on the Ge-on-Nothing (GeON) template. In this approach, a regular macropore array is formed by lithography and dry etching. These pores close and merge upon annealing, forming a suspended monocrystalline Ge membrane on one buried void. GOI is fabricated by direct bonding of GeON on Si carrier substrates, using an oxide bonding interface, and subsequent detachment. The fabricated GOI shows uniform physical properties as demonstrated using micro-photoluminescence measurements. Its electrical characteristics and cross-sectional structure are superior to those of Smart-CutTM GOI. To demonstrate its application potential, back-gate GOI capacitors and MOSFETs are fabricated. Their characteristics nicely agree with the theoretically calculated one and show typical MOSFET operations, respectively, which indicates promising Ge crystallinity. This method, therefore, shows the potential to provide high-quality GOI for advanced Ge application devices.

Low thermal crosstalk silicon MZI optical switch with high speed and low power consumption

Kohei Iino and Tomohiro Kita 2024 Jpn. J. Appl. Phys. 63 04SP21

We developed a compact thermo-optic Mach–Zehnder interferometer switch with a direct heating heater using multimode interference and achieved a sufficiently low thermal crosstalk performance. Large-scale switch systems, such as optical neural networks, require thermo-optical switches with low power consumption, fast switching speed, compact size, and low thermal crosstalk. This switch is equipped with a heater that directly heats the Si core waveguide, which is a structure that connects non-doped Si wires between phase shifters and a heatsink. As a result, a significant miniaturization with a phase shifter length of approximately 7 μm, low π-phase shift power consumption of less than 20 mW, and fast switching in sub-microseconds were achieved. The improved phase shifter showed a very small figure of merit of 8.89 mWbold dotμs. Simultaneously, transmission spectrum measurements of nearby ring resonators show that the thermal crosstalk is significantly reduced even at a distance of only 30 μm. This device can contribute to the overall circuit performance and footprint reduction in large-scale optical integrated circuits and optical neural network configurations.

Effects of crystallinity of silicon channels formed by two metal-induced lateral crystallization methods on the cell current distribution in NAND-type 3D flash memory

Haruki Matsuo et al 2024 Jpn. J. Appl. Phys. 63 04SP19

Two metal-induced lateral crystallization (MILC) methods are proposed as candidate techniques to enhance cell current in future ultra-high-density NAND-type 3D flash memory devices. The channel crystallinity differs depending on the MILC method. In a single MILC, the channel is composed of single-crystal Si, whereas in a regional MILC, the channel comprises multiple crystal grains that are larger than those of the conventional polycrystalline Si. Using transmission electron microscopy, the inhibiting factor of MILC was modeled to reveal that the two MILC approaches result in different cell current distributions that are related to their degree of crystallinity. A comparison of these two cell current distributions in a 3D flash memory with over 900 word-line stacks showed that the single MILC delivers a higher median cell current with outliers on the lower side. In contrast, the regional MILC delivers a lower median cell current without outliers on the lower side.

Dual integration design of approximate random weight generator and computation-in-memory for event-based neuromorphic computing

Naoko Misawa et al 2024 Jpn. J. Appl. Phys. 63 03SP83

This paper comprehensively analyses dual integration of approximate random weight generator (ARWG) and computation-in-memory for event-based neuromorphic computing. ARWG can generate approximate random weights and perform multiply-accumulate (MAC) operation for reservoir computing (RC) and random weight spiking neural network (SNN). Because of using device variation to generate random weights, ARWG does not require any random number generators (RNGs). Because RC and random weight SNN allow approximate randomness, ARWG only needs to generate approximate random weights, which does not require error-correcting code to correct weights to make the randomness accurate. Moreover, ARWG has a read port for MAC operation. In this paper, the randomness of random weights generated by the proposed ARWG is evaluated by Hamming distance and Hamming weight. As a result, this paper reveals that the randomness required for ARWG is much lower than that for physically unclonable functions and RNGs, and thus the proposed ARWG achieves high recognition accuracy.

Open access
Great enhancement of sensitivity for SARS-CoV-2 detection by integrated graphene FET biosensor using ζ potential modulator

Kaori Yamamoto et al 2024 Jpn. J. Appl. Phys. 63 03SP14

By modulating a ζ potential of graphene FET (G-EFT), the sensitivity of G-FET could be enhanced than that without modulation. Therefore, 1 × 107 FFU ml−1 SARS-CoV-2 was detected using G-FET modified with the ζ potential modulator which is the cation polymer with the positive charge. This method is based on the relationship between the surface charge and the sensitivity, in which the highest sensitivity is obtained when the ζ potential is 0 and/or the surface charge is almost 0. In this study, the microfluidic channel was installed on G-FET to get the precise result because it could wash away the free-floating virus and the physical adsorbed virus. 32 G-FETs including the reference FETs were integrated on the silicon substrate and the precise results were obtained by subtracting the noise terms.

Development of electron beam lithography technique for large area nano structural color

Sung-Won Youn et al 2024 Jpn. J. Appl. Phys. 63 03SP06

Plasmonic color is a structural color generated via preferential light absorption and scattering in dielectric nanostructures. In this study, a large plasmonic color image was successfully fabricated by an electron beam lithography (EBL) system. A software program, referred to as P-color in this study, was developed to facilitate the conversion of a desired color bitmap image to a GDS file composed of multiple nano-patterns to realize plasmonic color. The relationship between the color, width, and pitch of the pattern structures was investigated under different area-dose conditions during EBL as basic data for plasmonic color image design. After establishing conversion techniques for both the large-capacity GDS and EBL files, a plasmonic color image sample with a size of 60 mm × 40 mm area (which is difficult to fabricate using a conventional point-type EBL system) was successfully fabricated.

Design methodology of compact edge vision transformer CiM considering non-volatile memory bit precision and memory error tolerance

Naoko Misawa et al 2024 Jpn. J. Appl. Phys. 63 03SP05

This paper proposes a design methodology for a compact edge vision transformer (ViT) Computation-in-Memory (CiM). ViT has attracted much attention for its high inference accuracy. However, to achieve high inference accuracy, the conventional ViT requires fine-tuning many parameters with pre-trained models on large datasets and a large number of matrix multiplications in inference. Thus, to map ViT to non-volatile memory (NVM)-based CiM compactly for edge applications (IoT/Mobile devices) in inference, this paper analyses fine-tuning in training, clipping, and quantization in inference. The proposed compact edge ViT CiM can be optimized by three design methods according to use cases considering the required fine-tuning time, ease of setting memory bit precision, and memory error tolerance of ViT CiM. As a result, in CIFAR-10, the most compact type successfully reduces the total memory size of ViT by 85.8% compared with the conventional ViT. Furthermore, the high accuracy type and high error-tolerant type improve inference accuracy by 4.4% and memory-error tolerance by more than four times compared with convolutional neural networks, respectively.

Crystallinity and composition of Sc1−x(−y)Six(Py) silicides in annealed TiN/Sc/Si:P stacks for advanced contact applications

Bert Pollefliet et al 2024 Jpn. J. Appl. Phys. 63 02SP97

Sc-based contacts to Si:P have shown great potential for NMOS devices. However, the promising properties of this material system are not yet fully understood. This work provides new insights into the crystallinity and composition of annealed TiN/Sc/Si:P stacks. After silicidation, two distinct phases are evidenced, with orthorhombic ScSi lying atop a thin Sc1−xySixPy interfacial layer that shares a commensurate interface with the underlaid Si:P, hypothetically resulting in a low interface defectivity. The formed ScSi phase is observed to be thermally stable between ∼450 °C and 700 °C, which is suitable for most device applications. The impact of additional thermal budgets within this temperature range is investigated, revealing potential origins for thermally induced degradation of the contact properties.

Implementation of rock-paper-scissors judgment systems with a Ag2S reservoir

Atsuhiro Mizuno et al 2024 Jpn. J. Appl. Phys. 63 02SP60

There is a growing demand for physical reservoirs that operate with low power consumption and low computational cost. We have conducted research on the basic properties of Ag2S reservoirs, which are a type of physical reservoir. However, little research has been conducted on their applications. In this study, as a first step toward the practical application of Ag2S reservoirs, we implemented two types of rock-paper-scissors judgment systems using Ag2S reservoirs. In these experiments, we were able to demonstrate fast learning in the reservoir by comparing the results with methods using a single-layer perceptron and a convolutional neural network. In addition, we could obtain a maximum accuracy rate of about 98%.

Near-infrared gas spectroscopy based on plasmonic photodetector applied for multiple gas species

Utana Yamaoka et al 2024 Jpn. J. Appl. Phys. 63 012004

We proposed a NIR spectroscopy system that measures multiple types of gases using a plasmonic photodetector. We formed a gold diffraction grating on a silicon substrate to create a plasmonic photodetector and conducted gas spectral measurements in the NIR region. As a result, we could measure the transmission spectrum of water vapor gas at a concentration of 2%. Furthermore, we could measure ethanol gas transmittance at different concentrations of 4.5% and 2.7%, and change in transmission depending on concentration. Lastly, the transmission spectrum of 10% NH3 gas was measured. Since these results are consistent with evaluations using Fourier transform IR spectroscopy, it was confirmed that the proposed gas measurement can be applied to multiple types of gas sensing.

Reduction of working temperature for the large magnitude in thermoelectric dimensionless figure of merit of Ag2−xCuxS

Kosuke Sato et al 2023 Jpn. J. Appl. Phys. 62 111002

In this study, we try to reduce the temperature range for the large magnitude of dimensionless figure of merit ZT = 20 that was observed for the Ag2S composite consisting of low- and high-temperature phases under a unique temperature gradient at around 400 K. It reveals that partial substitution of Cu for Ag sites in Ag2S reduces the phase transition temperature, and subsequently the temperature range for this high ZT down to a temperature of 373 K. This result strongly suggests that our developed Cu-substituted Ag2S could be one of the best thermoelectric component materials in the generators capable of effectively recovering electric power from heat exchangers using hot water as a working liquid.

Demonstration of multi-active region p-down green LEDs with high quantum efficiency

Sheikh Ifatur Rahman et al 2023 Jpn. J. Appl. Phys. 62 110904

Longer wavelength emitters such as green LEDs display a pronounced efficiency drop at higher current densities, resulting in relatively low wall-plug efficiency (WPE). Multi-active region approach can improve the WPE significantly and tackle the "green gap" challenge. This work reports multi-active region p-down LEDs with high external efficiency operating entirely in the green wavelength. Devices were developed using p-down topology, where the PN junction is oriented such that electric fields from depletion and built-in polarization dipoles are aligned. Ga-polar multi-active region green LEDs with excellent voltage and external quantum efficiency scaling, and significantly higher WPE is demonstrated in this work.

Local atomic structure of V-doped BiFeO3 thin films measured by X-ray fluorescence holography

Kazuki Arima et al 2023 Jpn. J. Appl. Phys. 62 SM1017

Bismuth ferrite (BiFeO3: BFO) is a multiferroic material that exhibits ferroelectricity, antiferromagnetism, and ferroelasticity simultaneously at RT. BFO holds great promise as a ferroelectric semiconductor because of its ability to alter conductivity by reversing its spontaneous polarization. Moreover, BFO thin films doped with transition metals such as Mn or V can modulate their conductivity. Nevertheless, the mechanism of this conductivity change remains unclear because the effects of dopants on the local atomic structure of BFO are not fully understood. In this study, we investigated the local atomic structure around the Fe site in a V-doped BFO thin film by X-ray fluorescence holography. Reconstructed atomic structures from the Fe Kα hologram patterns revealed that the atomic structure stability of the V-doped BFO thin film differs from that of previously reported Mn-doped BFO thin films. The results provide important insights into the mechanism of controlling the conductivity of BFO thin films by dopants.

Surface-activated direct bonding of diamond (100) and c-plane sapphire with high transparency for quantum applications

Tetsuya Miyatake et al 2023 Jpn. J. Appl. Phys. 62 096503

Surface-activated direct bonding of diamond (100) and c-plane sapphire substrates is investigated using Ar atom beam irradiation and high-pressure contact at RT. The success probability of bonding strongly depends on the surface properties, i.e, atomic smoothness for the micron-order area and global flatness for the entire substrate. Structural analysis reveals that transformation from sapphire to Al-rich amorphous layer is key to obtaining stable bonding. The beam irradiation time has optimal conditions for sufficiently strong bonding, and strong bonding with a shear strength of more than 14 MPa is successfully realized. Moreover, by evaluating the photoluminescence of nitrogen-vacancy centers in the diamond substrate, the bonding interface is confirmed to have high transparency in the visible wavelength region. These results indicate that the method used in this work is a promising fabrication platform for quantum modules using diamonds.

Scanning time-resolved measurement of transient lattice strain on quartz oscillators resonating under alternating electric field

Shinobu Aoyagi et al 2023 Jpn. J. Appl. Phys. 62 SM1028

Distributions of transient and local lattice strains on resonating AT-cut quartz oscillators were measured in situ by scanning time-resolved X-ray diffraction under an alternating electric field to reveal the effects of the crystal shape and electrode thickness on their piezoelectric vibration. The concentration of the lattice vibration amplitude and energy at the electrode center in a plano-convex type oscillator and enhancement of the lattice strain in a plano–plano type oscillator within the electrode area with increasing electrode thickness have been unambiguously demonstrated by the method without any surface modifications.

Piezoelectric MEMS-based physical reservoir computing system without time-delayed feedback

Takeshi Yoshimura et al 2023 Jpn. J. Appl. Phys. 62 SM1013

In this study, a physical reservoir computing system, a hardware-implemented neural network, was demonstrated using a piezoelectric MEMS resonator. The transient response of the resonator was used to incorporate short-term memory characteristics into the system, eliminating commonly used time-delayed feedback. In addition, the short-term memory characteristics were improved by introducing a delayed signal using a capacitance-resistor series circuit. A Pb(Zr,Ti)O3-based piezoelectric MEMS resonator with a resonance frequency of 193.2 Hz was employed as an actual node, and computational performance was evaluated using a virtual node method. Benchmark tests using random binary data indicated that the system exhibited short-term memory characteristics for two previous data and nonlinearity. To obtain this level of performance, the data bit period must be longer than the time constant of the transient response of the resonator. These outcomes suggest the feasibility of MEMS sensors with machine-learning capability.

Open access
Direct observation of rotation of polarization at 90-degree domain walls in BaTiO3

Daisuke Morikawa et al 2023 Jpn. J. Appl. Phys. 62 SM1003

The rotation of polarization at 90-degree domain walls in tetragonal BaTiO3 was directly observed by the STEM-CBED method, which combines scanning transmission electron microscopy and convergent-beam electron diffraction (CBED). The CBED patterns in the domain wall region exhibit continuous changes in intensity distribution within disks and specific features corresponding to the direction of the rotation of polarization. Simulations were performed using hypothetical superstructures created by continuously connecting Ti displacement with a 90-degree rotation and showed good qualitative agreement with the experimental patterns. The quantitative evaluation of the mirror symmetries existing in the tetragonal structure in bulk form revealed the width of the domain wall is approximately 9 nm. While distorted regions with slightly broken symmetry in CBED disks were found to extend further on both sides of the domain wall region in 6–7 nm. This finding can explain the discrepancy in the domain wall widths reported in previous studies.

In situ electrical monitoring of SiO2/Si structures in low-temperature plasma using impedance spectroscopy

Junki Morozumi et al 2023 Jpn. J. Appl. Phys. 62 SI1010

To investigate the electrical properties and degradation features of dielectric materials during plasma exposure, we developed an in situ impedance spectroscopy (IS) system. We applied the proposed system to monitor SiO2/Si structures exposed to Ar plasma. By analyzing the measured data based on an equivalent circuit model considering the plasma and SiO2/Si structures, we obtained the resistance (R) and capacitance (C) values for the SiO2 film and SiO2/Si interface. In a cyclic experiment of in situ IS and high-energy ion irradiation, we characterized dielectric degradation by ion irradiation based on the variations in the R and C values of the SiO2 film. A continuous in situ IS measurement revealed temporal variations in the electrical properties of the film and interface independently. The thickness-dependent degradation observed for the RC variation was analyzed and compared with the results of previous ex situ measurement studies. This study demonstrates that the in situ IS measurement technique is promising for monitoring plasma-assisted dry processes.

Improvement of perovskite solar cell performance by oleylamine treatment of CuSCN hole-transport layer

Yuto Komazawa et al 2023 Jpn. J. Appl. Phys. 62 050902

Post-treatment of perovskite solar cells with CuSCN hole-transport layers to enhance their photovoltaic performance was investigated. Crystallinity and uniformity of CuSCN layers were improved by recrystallisation caused by oleylamine (OA) treatment. Further, the OA adsorbed on CuSCN tuned the VB edge potential and improved the hole extraction from perovskite materials. Power conversion efficiency of the CuSCN-based perovskite solar cells improved from 8.58% to 11.4%.

High efficiency perovskite/heterojunction crystalline silicon tandem solar cells: towards industrial-sized cell and module

Kenji Yamamoto et al 2023 Jpn. J. Appl. Phys. 62 SK1021

29.2%-conversion efficiency of a two-terminal (2T) perovskite/crystalline Si heterojunction tandem solar cell using 145 μm thick industrial Czochralski (CZ) Si wafer is obtained. The structural optimization, such as surface passivation of the perovskite layer and better light management techniques, improved power conversion efficiency (PCE). To our knowledge, this PCE is the best in 2T-tandem solar cells using CZ wafers. Towards industrialization, crucial issues with the 2T tandem solar cells with crystalline Si bottom cell are discussed. Four-terminal (4T) tandem solar cells are evaluated as an approach to avoid the crucial issues. Examining our base technologies which realize 22.2%-conversion efficiency perovskite single junction solar cell module and 26%-heterojunction back-contact solar cells, we clarified that the based technologies were ready to realize 30%-conversion efficiency 4T perovskite/heterojunction crystalline Si tandem solar cells with approximately quarter size of an industrial crystalline Si solar cell (∼64 cm2).

Design guides for artificial photosynthetic devices consisting of voltage-matched perovskite/silicon tandem solar-cell modules and electrochemical reactor modules

Yasuhiko Takeda et al 2023 Jpn. J. Appl. Phys. 62 SK1018

We clarified the design guides for H2- and CO-producing artificial photosynthetic devices. The combination of a voltage-matched (VM) tandem solar-cell (SC) module and an electrochemical (EC) module was adopted. The parallel-connected top and bottom SC modules, in which multiple organic–inorganic hybrid perovskite (PVK) SCs with a bandgap of 1.7 eV and crystalline-silicon SCs were connected in series, respectively, powered the EC module consisting of series-connected multiple EC reactors. It was found that the design parameters of the series connection numbers must be optimized under slightly greater solar intensity and higher temperature than the average values to minimize the mismatch between the device operating voltage and SC maximal power voltage. This is in contrast to that the annual electricity production of the VM SC module coupled with a power conditioner is not sensitive to the optimization conditions. Increases in the bandgaps of the PVK SCs do not affect the annual production significantly.

Investigation of high speed β-Ga2O3 growth by solid-source trihalide vapor phase epitaxy

Kyohei Nitta et al 2023 Jpn. J. Appl. Phys. 62 SF1021

Trihalide vapor phase epitaxy (THVPE) is a new type of halide vapor phase epitaxy (HVPE) that uses GaCl3 as a group III source, enabling Ga2O3 growth without particle generation, although the growth rate is low. In this study, β-Ga2O3 is grown by THVPE using solid GaCl3 as a group III precursor. The growth rate increases linearly with increasing partial pressure of the precursor. The dependence of the growth rate on the VI/III ratio is revealed on sapphire substrates, with the growth rate reaching a maximum at a VI/III ratio of 95. We have also obtained a growth rate of 32.2 μm h−1 on β-Ga2O3 (001) substrates with no particle generation, crystal quality equivalent to that of the substrate, and high purity equivalent to that of HVPE.

Exciton dynamics of a fused ring π-conjugated nonfullerene molecule based on dithienonaphthobisthiadiazole

Yuki Sato et al 2023 Jpn. J. Appl. Phys. 62 SK1012

Herein, we have studied the exciton dynamics of a novel fused ring π-conjugated molecule (YS3) in solution and film states by spectroscopic measurements. This molecule incorporates dithienonaphthobisthiadiazole as a core unit that is a two-dimensionally π-extended fused ring. As a result, we found a long exciton lifetime in YS3 films originating from reduced radiative and nonradiative transitions. This is partly because radiative deactivation is effectively suppressed because of the dipole-forbidden transition in H-aggregates and partly because rotational deactivation is effectively suppressed in the crystalline film state.

Mass spectrometric study of β-Ga2O3 growth process by metalorganic vapor phase epitaxy

Kazutada Ikenaga et al 2023 Jpn. J. Appl. Phys. 62 SF1019

In metalorganic vapor phase epitaxy of β-Ga2O3 using triethylgallium (TEGa) and O2 as precursors and Ar as the carrier gas, the gases directly above the substrate were sampled and analyzed by time-of-flight mass spectrometry. TEGa was found to decompose at 400 °C–600 °C via β-hydrogen elimination reaction to generate gaseous Ga, hydrocarbons (C2H4, C2H2, C2H6), and H2. When β-Ga2O3 was grown at temperatures greater than 1000 °C and with input VI/III ratios greater than 100, the hydrocarbons and H2 were combusted and CO2 and H2O were generated. The C and H impurity concentrations measured by secondary-ion mass spectrometry in the β-Ga2O3(010) homoepitaxial layer grown under these conditions were less than their respective background levels. Thus, to grow β-Ga2O3 without C and H contamination, conditions that favor the complete combustion of hydrocarbons and H2 generated by the decomposition of TEGa should be used.

Annealing effects on Cu(In,Ga)Se2 solar cells irradiated by high-fluence proton beam

Jiro Nishinaga et al 2023 Jpn. J. Appl. Phys. 62 SK1014

Radiation tolerance of Cu(In,Ga)Se2 (CIGS) solar cells has been investigated using high-fluence proton beam irradiation for application to devices in extremely-high-radiation environments. CIGS solar cells deteriorated after high-energy proton irradiation with non-ionizing energy loss of 1 × 1016 MeVneq cm−2, however, the CIGS solar cells could generate power after high-fluence irradiation. The ideality factors increased from 1.3 to 2.0, and series resistance increased, indicating that the concentration of recombination centers increased in CIGS layers. After heat-light annealing, the conversion efficiencies gradually recovered, and the recombination centers were confirmed to be partly passivated by annealing at 90 °C. The short-circuit currents for 10 μm thick CIGS solar cells were recovered by dark annealing in the same manner as for 2 μm thick CIGS solar cells. Dark annealing on irradiated CIGS solar cells has beneficial effects on passivate the recombination centers, even using thicker CIGS layers.

High-speed measurement of two-dimensional displacement of myocardium using element RF data of ultrasonic probe

Kaisei Hara et al 2023 Jpn. J. Appl. Phys. 62 SJ1040

Improving the accuracy of heart wall motion measurement is essential to realise better cardiac function evaluation. This paper proposed a two-dimensional (2D) displacement estimation method with a high temporal resolution using the 2D complex cross-correlation of element RF signals of an ultrasonic probe between frames returned from the target scatterers. The application of the proposed method to the phantom displacement confirmed its principle. The estimated 2D displacement of the phantom was consistent with the set displacement. Subsequently, the method was applied to two healthy subjects to measure the 2D displacement of the interventricular septum during one cardiac cycle. Consequently, during systole and diastole, the movement of the myocardium was measured, and the results were validated.

Growth of α-Ga2O3 on α-Al2O3 by conventional molecular-beam epitaxy and metal–oxide-catalyzed epitaxy

J. P. McCandless et al 2023 Jpn. J. Appl. Phys. 62 SF1013

We report the growth of α-Ga2O3 on m-plane α-Al2O3 by conventional plasma-assisted molecular-beam epitaxy and In-mediated metal–oxide-catalyzed epitaxy (MOCATAXY). We report a growth rate diagram for α-Ga2O3($10\bar{1}0$), and observe (i) a growth rate increase, (ii) an expanded growth window, and (iii) reduced out-of-plane mosaic spread when MOCATAXY is employed for the growth of α-Ga2O3. Through the use of In-mediated catalysis, growth rates over 0.2 μm h−1 and rocking curves with full width at half maxima of Δω ≈ 0.45° are achieved. Faceting is observed along the α-Ga2O3 film surface and explored through scanning transmission electron microscopy.

Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma

Shuichi Kuboi et al 2023 Jpn. J. Appl. Phys. 62 SI1003

The time dependence of the ion composition in pulse-modulated dual-frequency capacitively coupled plasma with Ar/C4F8/O2 was measured using a quadrupole mass spectrometer with an electrostatic energy analyzer. After turning on the pulse, Ar+ ions were preferentially generated, and then, the composition of CxFy+ ions, such as C2F4+ and C3F5+ ions, increased. This phenomenon was discussed on the basis of the time variation of electron temperature and the resultant change in the ratio of the C4F8 ionization rate to that of Ar atoms.

Development of a real-time temperature measurement technique for SiC wafer during ultra-rapid thermal annealing based on optical-interference contactless thermometry (OICT)

Jiawen Yu et al 2023 Jpn. J. Appl. Phys. 62 SC1075

A real-time temperature measurement technique with high spatial (≤20 μm) and temporal (≤1 μs) resolutions for SiC wafers during ultra-rapid thermal annealing (URTA) has been developed based on optical-interference contactless thermometry (OICT). This technique consists of hardware (OICT imaging setup) and software (fast temperature extraction program). Under URTA by atmospheric-pressure thermal plasma jet, a clear variation of optical-interference fringes was observed by a high-speed camera and then analyzed by a fast temperature extraction program using image preprocessing and a database. 3.5D (x, y, z and time) temperature distribution in SiC wafer was obtained within 0.43 s.

Two-inch Fe-doped β-Ga2O3 (010) substrates prepared using vertical Bridgman method

Yuki Ueda et al 2023 Jpn. J. Appl. Phys. 62 SF1006

The growth of large-diameter high-resistivity β-Ga2O3 (010) substrates is important for the low-cost production of lateral Ga2O3 devices. We grew a 2 inch diameter Fe-doped high-resistivity β-Ga2O3 (010) single crystal by using the vertical Bridgman (VB) method, which is expected to grow large-diameter β-Ga2O3 crystals with various crystal orientations. Two-inch substrates were prepared from the obtained crystals, and their crystallinity, concentration of Fe dopants, and electrical properties were investigated. Consequently, a 2 inch β-Ga2O3 (010) substrate, which is comparable to the largest size of (010) substrate prepared using the Czochralski method, was successfully fabricated with the VB method. The in-plane distribution of the X-ray rocking curve from 020 diffraction of the fabricated 2 inch substrate showed that the full widths at half maximums were less than 35 arcsec at almost all measurement points, indicating high crystallinity and high in-plane uniformity. In addition, the crystals contain Fe concentrations in the range of 3.5 × 1018–1.9 × 1019 cm−3, indicating that impurity Si donors are sufficiently compensated by the Fe dopants. Therefore, substrates prepared using the VB method exhibited high resistivities of 6 × 1011–9 × 1012 Ω·cm at room temperature.

Open access
High-mobility 4 μm MOVPE-grown (100) β-Ga2O3 film by parasitic particles suppression

Ta-Shun Chou et al 2023 Jpn. J. Appl. Phys. 62 SF1004

In this work, we comprehensively investigate the development of unwanted parasitic particles in the MOVPE chamber while growing μm level films. The density of the parasitic particles is found to be pronounced at film thicknesses starting from >1.5 to 2 μm. These particles seem to induce structural defects such as twin lamellae, thereby harming the electrical properties of the grown film. The origin of the parasitic particle is attributed to the parasitic reactions within the chamber triggered by the promoted gas-phase reactions during the growth process, which can be largely reduced by increasing the total gas flow and decreasing the showerhead distance to the susceptor. A film thickness of up to 4 μm has been achieved after minimizing the density of parasitic particles. Thereby, RT Hall measurements reveal carrier mobilities of 160 cm2V−1s−1 at carrier concentrations of 5.7 × 1016 cm−3.

Ultrasonic focusing using a stacked thin-plate region

Takaaki Fukuchi et al 2023 Jpn. J. Appl. Phys. 62 SJ1005

This paper describes a stacked thin-plate region for focusing the transmitted waves. The region was designed to focus the wave field in the bulk medium by utilizing the dispersion nature of Lamb waves. The first numerical calculation proved that an incident plane wave changes the wavefront in a stacked thin-plate region because of the different phase velocities in plates with different thicknesses, and the resulting transmitted wave was focused at the target. Second, when a delayed longitudinal wave was applied to the edge of the stacked thin-plate region with identical thickness, the numerical calculations showed that the delayed wavefront of the S0 mode was preserved in the stacked plate region, and that the transmitted longitudinal wave was appropriately focused at the target. The focusing devise consisting of a stacked thin-plate structure is useful for the buffer for phased array inspection.

Comprehensive analysis on error-robustness of FeFET computation-in-memory for hyperdimensional computing

Chihiro Matsui et al 2023 Jpn. J. Appl. Phys. 62 SC1053

This work comprehensively analyzes the error robustness of hyperdimensional computing (HDC) by using FeFET-based local multiply and global accumulate computation-in-memory. HDC trains and infers with hypervectors (HVs). Symmetric or asymmetric errors, which simulate read-disturb and data-retention errors of FeFET, are injected into Item memory and/or Associative memory before/after or during training in various cases when solving European language classification task. The detailed error injection reveals that HDC is acceptable for both symmetric and asymmetric error rate up to 10−1. Based on the detailed analysis of error robustness, training window slide (TWS) improves the error robustness against memory errors by removing data which contain different amount of errors. TWS shows 10 times higher error robustness. In addition, parallelization of HV encoding in training achieves fast training with up to 10 000 parallelism while maintaining the inference accuracy.

Ag2S island network reservoir that works with direct optical signal inputs

Yosuke Shimizu et al 2023 Jpn. J. Appl. Phys. 62 SG1001

A physical reservoir that accepts direct light irradiation as input was developed using a Ag2S island network. Short-term memory and nonlinearity required for reservoirs are achieved by the diffusion of Ag+ cations in each Ag2S island and the growth of Ag filaments between Ag2S islands. We found that direct light irradiation to Ag2S islands changes local conductivity in a reservoir, which enhances the performance in short-term memory and nonlinearity of the reservoir. Using the effect, we performed a pattern classification of light that was irradiated to a Ag2S island network reservoir through a rectangular slit, which resulted in the accuracy of over 95%.

Bulk-fin field-effect transistor-based capacitorless dynamic random-access memory and its immunity to the work-function variation effect

Sang Ho Lee et al 2023 Jpn. J. Appl. Phys. 62 SC1016

In this study, we developed a capacitorless dynamic random-access memory (DRAM) (1T-DRAM) device based on a junctionless (JL) bulk-fin field-effect transistor structure with excellent reliability and negligible variability against work-function variation (WFV). We investigated the variation in the transfer characteristics and memory performance of the memory cell owing to WFV. In particular, to investigate the WFV effect, we analyzed the transfer characteristics and memory performance of 200 samples using four metal-gate materials—TiN, MoN, TaN and WN. Consequently, we discovered that the WFV affected the transfer characteristics of the JL bulk-fin field-effect transistor. However, the proposed 1T-DRAM demonstrated that the sensing margin and retention time produced minimal effect owing to the adoption of a structure storing holes in the fin region. Consequently, the proposed 1T-DRAM exhibited strong WFV immunity and excellent reliability for memory applications.

Formation of a one-dimensional hole channel in MoS2 by structural corrugation

Yanlin Gao et al 2023 Jpn. J. Appl. Phys. 62 015001

We have investigated the energetics and electronic structure of monolayer MoS2 with periodic structural corrugations by density functional theory. The total energy of corrugated MoS2 slightly increases with increasing corrugation height, which indicates that the MoS2 sheet intrinsically and extrinsically possesses nanometer scale structural corrugation. The corrugation causes an upward shift of the valence band edge and a downward shift of the conduction band edge owing to the local strain at the wrinkle peak. Accordingly, by injecting holes using the external electric field, the corrugation leads to a one-dimensional conducting channel in the MoS2 sheet. This indicates that corrugation is a plausible procedure to control the dimensionality of the electrons and holes in two-dimensional materials without implementing one-dimensional boundary conditions.

Efficient optical phase modulator based on an III–V metal-oxide-semiconductor structure with a doped graphene transparent electrode

Tipat Piyapatarakul et al 2023 Jpn. J. Appl. Phys. 62 SC1008

We propose a III–V metal-oxide-semiconductor (MOS) optical modulator with a graphene gate electrode along with the analysis of the modulation properties. With p-type doped graphene used as a transparent gate electrode, we can fully utilize the electron-induced refractive index change in an n-type InGaAsP waveguide with the reduction of the hole-induced optical absorption observed in a III–V/Si hybrid MOS optical modulator. Numerical analysis displays that up to the phase modulation efficiency of 0.82 V·cm and 0.22 dB optical loss for π phase shift can be achieved when the gate oxide thickness is 100 nm. With the elimination of the unnecessary parasitic capacitance found in the overlapping of graphene on the slab part of the waveguide, in conjunction with the high electron mobility in InGaAsP, the device also enables a modulation bandwidth of greater than 200 GHz.

Ultraviolet photodetectors based on Si-Zn-SnO thin film transistors with a stacked channel structure and a patterned NiO capping layer

Rong-Ming Ko et al 2023 Jpn. J. Appl. Phys. 62 SC1006

Ultraviolet photodetectors (UVPDs) based on Si-Zn-SnO (SZTO) thin-film transistors (TFTs) with a stacked dual-channel layer (DCL) structure with different carrier concentration and NiO capping layer (CL) to alleviate the trade-off between dark current (Idark) and photocurrent (Iph) are reported. Experimental results show that under 275 nm irradiation, the proposed SZTO TFT UVPD with a 30 nm thick upper layer stacked on a 50 nm thick channel layer and a patterned NiO CL exhibit excellent photoresponsivity and photosensitivity up to 1672 A W−1 and 1.03 × 107 A A−1, which is about 272 and 137 times higher than conventional 30 nm thick single-channel layer SZTO TFT. These improvements are due to the use of a DCL which forms a high-low junction to reduce the effective channel thickness and increasing the space for UV illumination and the use of NiO CL lowers the Idark and causes a considerable negative threshold voltage shift under UV irradiation to significantly boost the Iph.

Thermal expansion coefficient and bulk modulus of silicides

Motoharu Imai and Takanobu Hiroto 2023 Jpn. J. Appl. Phys. 62 SD1001

The volumetric thermal expansion coefficient αV is discussed in relation to the bulk modulus B0 for transition-metal disilicides (TrSi2), alkaline-Earth metal disilicides (AeSi2), Mg2Si, and Si clathrates. For this purpose, the αV of CoSi2 at 300 K is determined to be 3.1 × 10−5 K−1 using powder X-ray diffraction measurements at temperatures ranging from 300 to 835 K. AeSi2 and Mg2Si have B0 values ranging from 27.9 to 52.9 GPa, while the values for αV range from 3.2 × 10−5 to 4.8 × 10−5 K−1. TrSi2 including CoSi2 has larger B0 values ranging from 148.9 to 243 GPa and smaller αV values ranging from 2.3 × 10−5 to 3.3 × 10−5 K−1 than AeSi2. Si clathrates have intermediate values of αV and B0, which are in between those of TrSi2 and AeSi2. Thus, the silicides with small B0 values tend to have large αV values.

Electrical detection and current control of all-optical magnetization switching in GdFeCo ferrimagnetic alloy thin film

Yuichi Kasatani et al 2023 Jpn. J. Appl. Phys. 62 SB1014

We experimentally demonstrated electrical detection of all-optical magnetization switching (AOS) induced by a single femtosecond laser pulse irradiation by measuring alternate rapid changes in anomalous Hall voltage and magneto-optic image pulse by pulse in a Hall-cross shape ferrimagnetic GdFeCo alloy thin film. We also demonstrated that the amplitude of the change in anomalous Hall voltage depended on the position of the AOS-created magnetic domain on the Hall cross. Furthermore, the AOS-created magnetic domains were stable against subsequent current applications in the Hall cross circuit, whereas reversed magnetic domains were not created when the laser pulse was irradiated with a high current. We found that the cooperative effect among magnetism, light, and electric current was assumed to have effects on the absence of the AOS. Combining the AOS phenomenon and electrical measurement/control techniques can realize ultrafast, deterministic, and distinguishable applications.

2022 Spotlights

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Implementation of the electron track-structure mode for silicon into PHITS for investigating the radiation effects in semiconductor devices

Yuho Hirata et al 2022 Jpn. J. Appl. Phys. 61 106004

In order to elucidate the mechanism of radiation effects in silicon (Si) devices, such as pulse-height defects and semiconductor soft errors, we developed an electron track-structure model dedicated to Si and implemented it into particle and heavy ion transport code system (PHITS). Then, we verified the accuracy of our developed model by comparing the ranges and depth-dose distributions of electrons in Si obtained from this study with corresponding experimental values and other simulated results. As an application of the model, we calculated the mean energies required to create an electron–hole pair in crystalline Si. Our calculated result agreed with the experimental data when the threshold energy for generating secondary electrons was set to 2.75 eV, consistent with the corresponding data deduced from past studies. This result suggested that the improved PHITS can contribute to the precise understanding of the mechanisms of radiation effects in Si devices.

Observation of quasi-elastic light scattering in BiFeO3

Eiichi Oishi et al 2022 Jpn. J. Appl. Phys. 61 SN1021

We observed quasi-elastic light scattering (QELS) in BiFeO3 using Raman spectroscopy over a temperature range of 300–860 K. The QELS has two componenets: narrow and broad ones. The temperature dependence of the intensity and linewidth of the broad component differed below and beyond the Néel point, and the broad QELS may have a magnetic origin.

Super-simplified optical correlation-domain reflectometry

Takaki Kiyozumi et al 2022 Jpn. J. Appl. Phys. 61 078005

Optical correlation-domain reflectometry (OCDR), which is known as one of the fiber-optic techniques for distributed reflectivity sensing, conventionally included an acousto-optic modulator, a reference path, and erbium-doped fiber amplifiers in its setup. In this work, by removing all of these components simultaneously, we develop a super-simplified configuration of OCDR, which consists of a light source and a photodetector only. We experimentally show that this system can still perform distributed reflectivity sensing with a moderate signal-to-noise ratio, which will boost the portability and cost efficiency of the OCDR technology.

Development of a simple calculation tool of dose distributions in a phantom for boron neutron capture therapy

Akihisa Ishikawa et al 2022 Jpn. J. Appl. Phys. 61 076503

A simple dose calculation tool, SiDE, was developed for dose evaluation in a water phantom for boron neutron capture therapy, which makes the calculation time much shorter compared with the conventional particle transportation Monte Carlo codes and is applicable to any type of incident neutron spectra to the phantom. As the SiDE can not only calculate quantitatively the dose distribution in the phantom but also output dose indexes such as advantage depth and peak tumor dose, a comparison between different boron neutron capture therapy neutron sources can be easily performed. Consistency with a Monte Carlo transportation code was verified through comparison with the conventional dose calculation with the Particle and Heavy Ion Transport Code System, and the calculation time was nearly 1/90 in the SiDE. The dose distributions for a reactor and accelerator-based neutron sources were compared, and the differences were found to be small although large differences existed between the incident spectra.

Open access
Tracking moving targets with wide depth of field behind a scattering medium using deep learning

Takumi Tsukada and Wataru Watanabe 2022 Jpn. J. Appl. Phys. 61 072003

When light propagates through a scattering medium, imaging of an object hidden behind the scattering medium is difficult due to wavefront distortion. Scattering imaging is a technique for reconstructing images by solving the problem of complex reconstruction from speckle images. Tracking moving targets behind a scattering medium is a challenge. Scattering imaging using deep learning is a robust technique that learns a huge number of pairs of ground-truth images and speckle images. Here, we demonstrate tracking of moving targets with an extended depth of field behind a scattering medium based on deep learning of speckle images acquired at different depths. We found that it was possible to track moving targets over a wide axial direction by increasing the number of trained positions.

In situ manipulation of perpendicular magnetic anisotropy in half-metallic NiCo2O4 thin film by proton insertion

T. Wada et al 2022 Jpn. J. Appl. Phys. 61 SM1002

Herein we report the manipulation of perpendicular magnetic anisotropy (PMA), a very important technique for spintronics devices, which is achieved in an all-solid-state redox (reduction/oxidation) device. The device consisted of NiCo2O4 (NCO) thin film with a c-axis orientation and a proton-conducting polymer (Nafion). The PMA of NCO can be manipulated in situ with low voltage (V ≤ 0.7 V) due to the utilization of a proton-conducting solid electrolyte. The magnetic anisotropy variation was quantitatively evaluated by an anomalous Hall measurement. The magnetic anisotropy field of the NCO thin film was successfully manipulated in the range of 5%, although the rotation of the easy axis of magnetization was not observed. This modulation is attributed to the strain and electronic configuration variation by proton insertion. This manipulation method for PMA with the solid electrolyte enables a variety of reservoir states and contributes to lower power consumption and high-precision machine learning.

Phase control of heterogeneous HfxZr(1−x)O2 thin films by machine learning

Zeyuan Ni and Hidefumi Matsui 2022 Jpn. J. Appl. Phys. 61 SH1009

Polymorphic HfxZr(1−x)O2 thin films have been widely used as dielectric layers in the semiconductor industry for their high-k, ferroelectric, and antiferroelectric properties in the metastable non-monoclinic phases. To maximize the non-monoclinic components, we optimize the composition depth profile of 20 nm PVD HfxZr(1−x)O2 through closed-loop experiments by using parallel Bayesian optimization (BO) with the advanced noisy expected improvement acquisition function. Within 40 data points, the ratio of non-monoclinic phases is improved from ∼30% in pure 20 nm HfO2 and ZrO2 to nearly 100%. The optimal sample has a 5 nm Hf0.06Zr0.94O2 capping layer over 15 nm Hf0.91Zr0.09O2. The composition and thickness effect of the capping layer has been spontaneously explored by BO. We prove that machine-learning-guided fine-tuning of composition depth profile has the potential to improve film performance beyond uniform or laminated pure crystals and lead to the discovery of novel phenomena.

Memristive crossbar circuit for neural network and its application in digit recognition

Xiang Wan et al 2022 Jpn. J. Appl. Phys. 61 060905

A neural network fully implemented by memristive crossbar circuit is proposed and simulated, which can operate in parallel for the entire process. During the forward propagation, memristors in crossbar structure and a column of fixed-value resistors implement multiply-add operations. During the backward training, each memristor is tuned in conductance independently by training pulses, which implements weight/bias updating. A high recognition accuracy of 93.65% for hand-written numbers is achieved, which is comparable to that for software solution. The effects of the number of conductance states and the amplification of synaptic array circuit on the recognition accuracy are also investigated.

Enhancement of transparency in epitaxially-grown p-type SnO films by surface-passivation treatment in a Na2S aqueous solution

Suguri Uchida et al 2022 Jpn. J. Appl. Phys. 61 050903

We report on the epitaxial growth of (001)-oriented SnO films on yttria-stabilized zirconia (100) substrates by pulsed-laser deposition and the impact of surface-passivation treatment on the optical transparency. The films immersed in a Na2S aqueous solution exhibited average visible transmittance higher than that of the as-grown ones by ∼18% despite negligibly small variations in the crystalline structure, p-type conductivity, and composition. Based on these results, the enhanced visible transmittance can be attributed to the suppression of midgap states near the film surface. The extended treatment resulted in conversion to a SnS phase, demonstrating a facile anion-exchange reaction.

Electric-field-induced modulation of giant perpendicular magnetic anisotropy obtained by insertion of an Ir layer at the Fe/MgO interface: a first-principles study

Yukie Kitaoka and Hiroshi Imamura 2022 Jpn. J. Appl. Phys. 61 060902

First-principles calculations were performed to study the effect of the insertion of magnetic layers composed of 3d, 4d, and 5d elements at the Fe/MgO interface on the magnetocrystalline anisotropy energy (MAE) and its modulation by an external electric-field. We found that the insertion of an Ir layer on the MgO substrate increases the MAE. In particular, the insertion of a Fe/Co/Ir magnetic layer leads to a large perpendicular magnetic anisotropy (PMA). The largest PMA and the largest voltage-controlled MA coefficient is obtained for the Au/Fe/Co/Ir/MgO system.

Open access
Statistical analysis of properties of non-fullerene acceptors for organic photovoltaics

Naoya Yamaguchi et al 2022 Jpn. J. Appl. Phys. 61 030905

From ∼1500 published journal papers on organic photovoltaics (OPVs), we extracted the OPV performance parameters of power conversion efficiency (PCE), open-circuit voltage (VOC) and short-circuit current density (JSC) and the chemical structures of photovoltaic layer materials to investigate the relation between the extracted data of OPVs accompanied by non-fullerene acceptors (NFAs). Our analysis indicates that there is a suitable range of VOC for high PCE or JSC in NFAs. We also investigated the correlation between the performance parameters and chemical structures of small-molecule NFAs. Our approach may enable us to provide a new design strategy for high-performance OPVs.

Application of gold nanomaterials for ionizing radiation detection

Daiki Shiratori et al 2022 Jpn. J. Appl. Phys. 61 SB1015

Au nanomaterials are known to change their properties significantly depending on their particle size. The prepared chloride glasses exhibited yellow emission (520 nm) upon UV rays (250 nm) irradiation, and the intensity of emission was found to decrease with X-ray dose. We concluded that this is because luminescent Au nanoclusters (AuNCs) of a few nanometers in size grow into Au nanoparticles (AuNPs) of a few tens of nanometers in size due to the photoreduction effect induced by irradiating X-ray, and the absorption (550 nm) attributed to the surface plasmon effect of AuNPs make decrease the AuNCs emissions. From the results of the changes of photoluminescence (PL) intensity concerning the irradiation X-ray dose, it was found that the PL intensity monotonically decreased 3000 mGy or more. This suggests that the Au-doped CsCl–BaCl2–ZnCl2 glass can act as an X-ray detection material in a specific dose region.

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