Abstract
In this study, three CrSiN based coatings were fabricated using cathodic arc deposition (CAD) technique. CrSiCN coatings were obtained by using metal plasma activated CAD process to decompose the C2H2 and N2 reactive gas. The analyzed CrSiCN coatings were obtained with higher hardness and smooth surface. With addition of Si (8.7 at.% ) and C (41 at.%) in the coatings, the hardness increased to Hv3300 which is resulted from the addition of CrCN and CNx new phases. Tribological test shows the coefficient of friction of CrSiCN down to 0.2 was observed with the addition of Si and C, related to hardness and smooth surface. However, the corrosion resistance of the CrSiN coating is better than that of CrSiCN coating in the 1M H2SO4 solution at room temperature.
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