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Paper The following article is Open access

Defect formation in fluoropolymer films at their condensation from a gas phase

Published under licence by IOP Publishing Ltd
, , Citation P A Luchnikov 2018 IOP Conf. Ser.: Mater. Sci. Eng. 289 012037 DOI 10.1088/1757-899X/289/1/012037

1757-899X/289/1/012037

Abstract

The questions of radiation defects, factors of influence of electronic high-frequency discharge plasma components on the molecular structure and properties of the fluoropolymer vacuum films synthesized on a substrate from a gas phase are considered. It is established that at sedimentation of fluoropolymer coverings from a gas phase in high-frequency discharge plasma in films there are radiation defects in molecular and supramolecular structure because of the influence of active plasma components which significantly influence their main properties.

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