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Effect of GaAs native oxide upon the surface morphology during GaAs MBE growth

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Published under licence by IOP Publishing Ltd
, , Citation O A Ageev et al 2016 J. Phys.: Conf. Ser. 741 012012 DOI 10.1088/1742-6596/741/1/012012

1742-6596/741/1/012012

Abstract

The GaAs native oxide effect upon the surface morphology of the GaAs epitaxial layer was studied with taking into account the main growth parameters of MBE technology: substrate temperature, effective As4/Ga flux ratio and growth rate. The MBE modes of atomically smooth and rough surfaces and surfaces with Ga droplet array formation were determined. The possibility of the obtaining of GaAs nanowires via GaAs native oxide layer was shown.

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10.1088/1742-6596/741/1/012012