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Determination of the fractal size of titanium films at different scales

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, , Citation D V Ivanov et al 2021 J. Phys.: Conf. Ser. 1758 012013 DOI 10.1088/1742-6596/1758/1/012013

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nsdobnyakov@mail.ru

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1 Tver State University, 170100, Russia, Tver, 33 Sadovii per.

2 Tver State Agricultural Academy, 170904, Russia, Tver, 7 Vasilevskogo str.

3 Belarusian State Technological University, 220006, Belarus, Minsk, 13a Sverdlova str.

4 MIREA - Russian Technological University, 119454, Russia, Moscow, 78 Vernadskogo str.

5 Fryazino Branch of V.A. Kotelnikov Institute of Radio Engineering and Electronics of Russian Academy of Sciences, 141190, Russia, Moscow region, Fryazino, 1 Vvedenskogo sq.

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1742-6596/1758/1/012013

Abstract

The morphology of the relief of nanosized titanium films on the mica surface was studied using a scanning probe microscope at various scales. The characteristic features of the nanorelief of the surface of the investigated films, including fractal properties, are described. The obtained data on the fractal dimension are compared with the available experimental data, as well as the data obtained using scanning tunneling microscopy. Recommendations for the development of technology for «growing» structures with a given surface morphology are proposed.

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10.1088/1742-6596/1758/1/012013