Modeling of a Temperature Distribution in Optomechanical Thermal Microsystems

An approach for modeling the temperature distribution in optomechanical thermal microsystems is presented. Three types of the microsystems are considered: microsystem with two supporting microbeams in adjacent corners of the microplate; microsystem with two supporting microbeams in opposite corners of the microplate; microsystem with four supporting microbeams. In the structure of each type of the microsystems, the modeling domains are marked out, which are divided into zones with homogeneous equivalent parameters. Analytical expressions for the temperature distribution in the zones of optomechanical thermal microsystems are obtained. The method of modeling was used to determine the temperature distribution in bi-material sections in cantilever microbeams in the optomechanical thermal microsystems under consideration. The dependence of the temperature difference on the boundaries of the bi-material section on the thickness of the aluminum layer in this section was determined.