This site uses cookies. By continuing to use this site you agree to our use of cookies. To find out more, see our Privacy and Cookies policy.

Control of Step Arrays on Normal and Vicinal SrTiO3(100) Substrates

, , , , and

Copyright (c) 1998 The Japan Society of Applied Physics
, , Citation Jiacai Nie et al 1998 Jpn. J. Appl. Phys. 37 L1014 DOI 10.1143/JJAP.37.L1014

1347-4065/37/9A/L1014

Abstract

The surface morphologies of SrTiO3 substrates have been investigated by atomic force microscopy. Periodic step arrays could be developed on both normal and vicinal SrTiO3 (100) substrates by a new method employed both buffered NH4F-HF (BHF) solution and O2 annealing. An explanation is given for the surface morphologies observed which involves the surface stoichiometrical change upon BHF solution and surface diffusion upon oxygen annealing.

Export citation and abstract BibTeX RIS

10.1143/JJAP.37.L1014