Application of TiN/TiO₂ coatings on stainless steel: composition and mechanical reliability

The paper reports on the effect of the substrate temperature (350 °C, 380 °C and 420 °C) during reactive magnetron sputtering of a TiN film on the phase composition, texture and mechanical properties of TiN/TiO₂ coatings on 304L stainless steel substrates. Pure Ti was used as a cathode source of Ti. The texture and unit cell parameters of both TiN and TiO₂ phases of the coating are discussed in relation with the tribological properties and adhesion of the coating. The scratch tests performed showed that the nitride deposited at 380 °C, having the highest unit cell parameter and a predominant (111) texture, possessed the lowest friction coefficient (μ), tangential force and brittleness. The anatase-type TiO₂ with predominant (101) pole density and increased c unit cell parameter showed the highest stability on the nitride deposited at 420 °C. The results indicated that the friction coefficient, tangential force and critical forces of fracture could be varied by controlling the coating deposition temperature.