Analysis of Dissociation Mechanism of CO₂ in a Micro-Hollow Cathode Discharge^*

Considering the feature of distributions of parameters within the micro-hollow cathode discharge, we use a simple method to separate the sheath region characterized by drastic changes of plasma parameters and the bulk plasma region characterized by smooth changes of plasma parameters. A zero-dimensional chemical kinetic model is used to analyze the dissociation mechanism of CO₂ in the bulk plasma region of a micro-hollow cathode discharge and is validated by comparisons with previous modeling and experimental results. The analysis of the chemical kinetic processes has shown that the electron impact dissociation and heavy species impact dissociation are dominant in different stages of the micro-hollow cathode discharge process for a given applied voltage. The analysis of energy consumption distributions under different applied voltages reveals that the main reason of the conversion improvement with the increase of the applied voltage is that more input energy is distributed to the heavy species impact dissociation.