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The Japan Society of Applied Physics, find out more

The Japan Society of Applied Physics

The Japan Society of Applied Physics (JSAP) serves as an academic interface between science and engineering and an interactive platform for academia and the industry. JSAP is a "conduit" for the transfer of fundamental concepts to the industry for development and technological applications.

JSAP was established as an official academic society in 1946, and since then, it has been one of the leading academic societies in Japan. The society's interests cover a broad variety of scientific and technological fields, and JSAP continues to explore state-of-the-art and interdisciplinary topics.

To this end, the JSAP holds annual conferences; publishes scientific journals; actively sponsors events, symposia, and festivals related to science education; and compiles information related to state-of-the-art technology for the public.

Scatterometry of Slant Incidence to Isolated Scatterers for High-Density Memory

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Published 20 September 2013 • Copyright (c) 2013 The Japan Society of Applied Physics
, , Citation Tetsuya Hoshino et al 2013 Jpn. J. Appl. Phys. 52 09LA05

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Author affiliations

1 Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8577, Japan

2 Center for Optical Research & Education, Utsunomiya University, Utsunomiya 321-8585, Japan

Dates

Received 7 December 2012
Accepted 5 July 2013
Published

DOI

https://doi.org/10.7567/JJAP.52.09LA05

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1347-4065/52/9S2/09LA05

Abstract

The turning on and off of a convex scatterer can be used to store information in digital versatile disc (DVD) or Blu-ray technology. In addition, the distance between scatterers can be used as information, if it is precisely measured. Using a recently developed method, a single Fourier transformation of a diffraction pattern can be used to measure the distance between scatterers with high precision and without a lens. To enhance the precision for high-density memory, we examined a method to improve the resolution of measuring isolated convexes. We show by simulation of RCWA that slant incident light is useful for this purpose. We also show by experiment the validity of the method using gratings and the wing of a butterfly.

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10.7567/JJAP.52.09LA05