ECS Meeting Abstracts

Segmented Modeling of Large-Area VHF PECVD Thin-Film Amorphous Silicon Deposition System

Krishna Shenai¹, Krushal Shah¹, Ramasamy Raju² and Aarohi Vijh²

© 2011 ECS - The Electrochemical Society
ECS Meeting Abstracts, Volume MA2011-02, E6 - Photovoltaics for the 21st Century 7 Citation Krishna Shenai et al 2011 Meet. Abstr. MA2011-02 1978 DOI 10.1149/MA2011-02/29/1978

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¹ The University of Toledo

² Xunlight Corporation

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