Thin Film Lithium Battery using Stable Solid Electrolyte Li₄SiO₄ Fabricated by PLD

The Li₄SiO₄ thin film was successfully deposited by pulsed laser deposition (PLD) technique using an ArF excimer laser. The morphology, the micro structure and the ionic conductivity of the Li₄SiO₄ film were investigated. The ionic conductivity was 4.1×10^-7Scm^-1 at 25{degree sign}C. A solid-state thin film battery (TFB) consisting of the amorphous Li4SiO4 electrolyte with LiCoO₂ positive electrode and Li metal negative electrode was fabricated and characterized. The TFB exhibited good reversibility on CV cycles for more than 50 cycles between 3.0 and 4.4V.