Abstract
Depending on the applied electrochemical parameters, various anodic films can be grown onto InP in aqueous media. In borate buffer at pH = 9, the formation of homogeneous and thin InPO4-like films occurred when anodic treatment is performed with a low current density, while with higher imposed current configuration porous and thicker layers are grown. In this work, AFM measurements coupled with XPS analyses and capacitance-voltage investigations have been used to study the relationship between morphology, composition and electrical properties of different anodic oxide films performed on InP surface, with current densities ranging from 1 mA.cm-2 to 100 mA.cm-2.