Abstract
Heteroepitaxial films of 
have been grown on 
substrates by the reaction of triethylindium and trimethylgallium with arsine gas. Specular films have been obtained over the entire composition range at a substrate temperature of 600°C. The observed mobilities of 1–2 μm thick films are about one‐third of the reported bulk values in literature and show a minimum at a composition of approximately 
. The mobility of such films decreases sharply with decreasing temperature.