Toshiro Maruyama1 and Hisao Akagi1
© 1998 ECS - The Electrochemical Society
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Citation Toshiro Maruyama and Hisao Akagi 1998 J. Electrochem. Soc. 145 1303
DOI 10.1149/1.1838455
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Thin films of amorphous germanium‐tin alloy 
have been prepared by sputtering germanium and tin targets with argon in a radio‐frequency magnetron sputtering system. X‐ray diffraction reveals that the film for x < 0.38 is amorphous but that crystalline β‐Sn is formed in the amorphous film for x ≧ 0.38. The optical energy gap is expressed by 
[eV] for x < 0.38. The equation also correlates the pseudo‐optical energy gap for the GeSn‐β‐Sn composite film.
