Abstract
It is necessary to form fine holes and grooves by machining in the manufacture of equipment in the medical or information field and the establishment of such a machining technology is required. In micromachining, the use of the ultrasonic vibration cutting method is expected and examined. In this study, I experimentally form microgrooves in stainless steel SUS304 by the ultrasonic vibration cutting method and examine the effects of the shape and material of the tool on the machining accuracy. As a result, the following are clarified. The evaluation of the machining accuracy of the straightness of the finished surface revealed that there is an optimal rake angle of the tools related to the increase in cutting resistance as a result of increases in work hardening and the cutting area. The straightness is improved by using a tool with low flexural rigidity. In particular, Young's modulus more significantly affects the cutting accuracy than the shape of the tool.