Abstract
Single crystals for 300 mm wafer are grown by horizontal magnetic Czochralski method. 300 mm wafers are made from the vertical samples cut from crystal along ingot axial direction. Micro defects in various defect regions are investigated with various measurement methods. In order to investigate the size of the defects, the locations of defects are identified, the wafers with the defects are cut in cross-sectional direction, and the sizes of the defects are measured by transmission electron microscopy (TEM). The voids more than 20 nm size exist in vacancy-rich region. Any as-grown defect is not observed by any available measurement tools in the region having nuclei of oxidation-induced stacking fault (P-band), pure silicon in a vacancy-dominant crystal region (Pv), and pure silicon in an interstitial-silicon-dominant crystal region (Pi). High sensitive laser scattering tomography system with the detection limit of 20 nm size is used to investigate as-grown defects in P-band, Pi, and Pv regions. It is concluded that there are no as-grown defects more than 20 nm size in P-band, Pi, and Pv regions.