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Structural Effects on Thermal Conductivity of SiGeAu Superlattice Thin Films

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Published 20 August 2010 Copyright (c) 2010 The Japan Society of Applied Physics
, , Citation Yoichi Okamoto et al 2010 Jpn. J. Appl. Phys. 49 085801 DOI 10.1143/JJAP.49.085801

1347-4065/49/8R/085801

Abstract

We have measured the thermal conductivity of thin films and discussed the relationship between the thermal conductivity and structure of thin films. All samples had a very low thermal conductivity compared with a conventional bulk sample. The thermal conductivity changed depending on the sample structure. The thermal conductivity decreased with the existence of the artificial superlattice structure and the phase transition to the amorphous phase.

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10.1143/JJAP.49.085801