Abstract
We present a frequency-comb-based interferometric microscope using a broadband comb light source and a line-type image sensor for profilometry and optical tomography. A waveguide-type frequency comb generator and wavelength equalizer were introduced to broaden the comb spectrum. In this paper, we demonstrate the surface profilometry of a coin and the observation of a cross-sectional tomography image of transparent glass. The three-dimensional images were captured using a line-type image sensor without any mechanical moving parts with a frequency interval variation of 25 GHz. The dynamic range in the depth direction was about 1.4 mm and the measurement resolution was 35 µm. The standard deviation of seven thickness measurements was 5 µm.
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