Optical Properties of KTaxNb1-xO3 Waveguides Formed by Carbon and Proton Implantation

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Published 7 September 2007 • Copyright (c) 2007 The Japan Society of Applied Physics
, , Citation Liang-Ling Wang et al 2007 Jpn. J. Appl. Phys. 46 5885 DOI 10.1143/JJAP.46.5885

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1 School of Physics and Microelectronics, Shandong University, Jinan 250100, Shandong, People's Republic of China

2 School of Information Science and Engineering, Shandong University, Jinan 250100, Shandong, People's Republic of China

3 State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, Shandong, People's Republic of China

4 The Key Laboratory of Heavy Ion Physics (Peking University), Ministry of Education, Beijing 100871, People's Republic of China

Dates

  1. Received 17 May 2007
  2. Accepted 7 June 2007
  3. Published

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Abstract

Planar optical waveguides in KTaxNb1-xO3 (KTN) crystals were formed by 3.0 MeV C ion implantation with the dose of 1×1015 ions cm-2 and 500 keV proton implantation with the dose of 2×1016 ions cm-2, respectively. The modes in KTN waveguides were measured by a model 2010 prism coupler, four dark modes were observed at 633 nm, while only one mode was observed at 1539 nm for the waveguide formed by C ion implantation. Reflectivity calculation method (RCM) was applied to simulate the refractive index profile in waveguides. The SRIM'2006 (the Stopping and Range of Ions in Matter) code was applied for simulating the process of the ion implantation in order to obtain a better understanding for the waveguide formation.

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10.1143/JJAP.46.5885