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Investigation of Micro Solid Immersion Lens Mounting Systems

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Published 22 June 2007 Copyright (c) 2007 The Japan Society of Applied Physics
, , Citation Matthew Lang et al 2007 Jpn. J. Appl. Phys. 46 3737 DOI 10.1143/JJAP.46.3737

1347-4065/46/6S/3737

Abstract

Concept, design and analysis of several solid immersion lens (SIL) mounting systems utilizing high-index refractive micro SILs are described. This paper proposes several designs for wafer-scale SIL assemblies capable of a numerical aperture of 2.2.

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10.1143/JJAP.46.3737