Abstract
High-purity transparent conductive Al-doped ZnO (AZO) films were grown by KrF excimer pulsed laser deposition. We used ultraviolet and X-ray photoelectron spectroscopes to directly measure the absolute values of the vacuum work function of AZO films. The structure and electrical and optical properties of the as-grown AZO films were studied using X-ray diffraction, room temperature Hall effect measurement and spectro photometer, respectively. Finally, organic light emitting diodes (OLED) were fabricated on these AZO films. OLED device measurement showed that the current of the OLED with AZO was clearly increased. Our AZO thin films showed a higher conductivity (ρ=1.33×10-4 Ω cm, Rs=10.1 Ω/sq) than conventional indium tin oxide films.