Inverse Determination of Coupling of Modes Parameters of Surface Acoustic Wave Resonators

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Copyright (c) 2002 The Japan Society of Applied Physics
, , Citation T.-T. Wu et al 2002 Jpn. J. Appl. Phys. 41 6610 DOI 10.1143/JJAP.41.6610

1347-4065/41/11R/6610

Abstract

Extraction of coupling of modes (COM) parameters from the manufacturing process of a surface acoustic wave device (SAW) is important in practice. In this study, we employed an inverse algorithm to recover the COM parameters from the measured admittance of a one-port SAW resonator. For completeness, the COM equations, the P-matrix representation and the related COM parameters have been summarized. The admittance of a one-port resonator was derived based on the P-matrix representation. One-port and two-port SAW resonator filters were fabricated and the related responses were measured. The simplex method was then used to determine the COM parameters inversely. The recovered COM parameters of the one-port SAW resonator have been demonstrated to be applicable to simulate not only the frequency response of the one-port SAW resonator but also that of the two-port one.

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10.1143/JJAP.41.6610