Elemental analysis of Pd complexes, which consist of a thin Pd layer, alternating CaO and Pd layers and bulk Pd, is described, after subjecting the Pd complexes to D2 gas permeation. The Pd complex was located in a vacuum chamber and the elemental analysis was performed using an X-ray photoelectron spectroscopy (XPS) apparatus mounted on the chamber. When Cs was added on the surface of a Pd complex, Pr emerged on the surface while Cs decreased after the Pd complex was subjected to D2 gas permeation at 343 K and 1 atm for about one week. In the case of adding Sr on the surface, Mo emerged on the surface while the added Sr decreased after D2 permeation for about two weeks. All the phenomena were reproduced qualitatively. The isotopic composition of the detected Mo exhibited characteristics indicating an isotopic abundance of Sr rather than the natural abundance of Mo.