Abstract
A magnetic imaging system with a micro-DC superconducting quantum interference device magnetometer has been developed to evaluate superconducting films and to inspect a superconducting device with a high spatial resolution. A superconducting device, i.e., a DC-SQUID made of a superconducting Nb thin film, was observed using the system. The shape of the device was identified by applying the Meissner effect. The trapped fluxes in the device were clearly visible. In addition, the input current and the shielding current flowing on the device were detected by feeding a current to the device. It was confirmed experimentally that the magnetic imaging system was effective in studying superconducting devices.