Abstract
Crystalline lead zirconate titanate (PZT) films formed hydrothermally in a test-tube autoclave have heterogeneous chemical composition, because the concentration of each ion (Pb, Zr and Ti) in solution cannot be controlled. A continuous-supply autoclave system was used to obtain PZT films with desirable chemical compositions. A solution was sampled from the reactor during the reaction, and the change in concentration of elements was measured. Based on the results, the appropriate composition and concentration were determined. The obtained PZT film has an intermediate layer between the film and titanium substrate. The layer was much thinner than that obtained with a test-tube autoclave.