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High Pressure Operation of an Electron Beam Gun

Copyright (c) 1986 The Japan Society of Applied Physics
, , Citation Takao Fusayama 1986 Jpn. J. Appl. Phys. 25 L406 DOI 10.1143/JJAP.25.L406

1347-4065/25/5A/L406

Abstract

An electron beam gun has been continuously operated at ambient pressure up to 5 Torr in helium and 0.5 Torr in argon using narrow gap electrodes and a plasma cathode. Contrary to a hollow cathode electron gun, this device is such that electron beam energy and current are independently controlled without current loss even in the low energy region. A maximum electron energy up to 2 keV and current density of 0.6 A·cm-2 are obtained by means of graphite perforated plate electrodes.

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10.1143/JJAP.25.L406