Fabrication of Flat MgO(111) Films on Al2O3(0001) Substrates by Pulsed Laser Deposition

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Published 11 September 2009 ©2009 The Japan Society of Applied Physics
, , Citation Tomofumi Susaki et al 2009 Appl. Phys. Express 2 091403 DOI 10.1143/APEX.2.091403

1882-0786/2/9/091403

Abstract

We have found that epitaxial MgO(111) thin films grow under a wide range of deposition conditions (substrate temperatures of 400–800 °C, oxygen partial pressures of 10-4–100 Pa) on α-Al2O3(0001) substrates by pulsed laser deposition (PLD), despite the strongly divergent electrostatic potential of MgO(111). The surfaces of the resulting thin films show step-and-terrace structures reflecting the surface of α-Al2O3(0001) with a small root-mean-square roughness of 0.62 nm even at a film thickness of 80 nm. These results present the possibility of fabricating various artificial oxide structures using flat MgO(111) films produced by a conventional PLD technique.

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