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Development Prospects of High-Vacuum Mechanical Pumps Using Magnetic Bearing Support

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Published under licence by IOP Publishing Ltd
, , Citation A Ochkov and M Hamadi 2020 IOP Conf. Ser.: Mater. Sci. Eng. 963 012035 DOI 10.1088/1757-899X/963/1/012035

1757-899X/963/1/012035

Abstract

The analysis of existing high-vacuum mechanical pumps with magnetic suspensions is carried out. The schemes and algorithms used for calculations for permanent magnetic suspensions (PMS) and active magnetic suspensions (AMS) are presented. Based on the results of the analysis, the relevance of the use of magnetic suspensions in high-vacuum mechanical pumps was evaluated, the development prospects of high-vacuum mechanical pumps with magnetic suspensions were noted.

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10.1088/1757-899X/963/1/012035