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Comparison of parameters of heteroepitaxial structures

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, , Citation A K Tashatov et al 2020 IOP Conf. Ser.: Mater. Sci. Eng. 919 022006 DOI 10.1088/1757-899X/919/2/022006

1757-899X/919/2/022006

Abstract

In this work, the structure and properties of heteroepitaxial and multilayer thin film systems obtained by thermal diffusion, MBE, and ion implantation have been comprehensively studied created.

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10.1088/1757-899X/919/2/022006