Research on surface quality of Si₃N₄ ceramics by internal grinding

The machined surface quality of hard and brittle materials was studied based on the analysis of the material removal mechanism of ceramics. According to the geometrical relationship of the internal grinding, the equivalent diameter of grinding wheel was deduced. In the internal grinding, the models of undeformed chip thickness, peak-valley surface roughness and arithmetic mean surface roughness were established with the assistance of planar grinding. The proposed models were verified utilizing the orthogonal test of internal grinding Si₃N₄ ceramics. The trend of experimental results was consistent with the theoretical model. The scientific validity of the proposed models was supported by the experimental results, and the investigation provides a theoretical reference and experimental basis for further study on the grinding of ceramic materials.