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Experimental Research on Micro-nozzle Applied on Micro-propulsion Systems based on MEMS

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, , Citation Zhang Bao-jun et al 2017 IOP Conf. Ser.: Mater. Sci. Eng. 187 012044 DOI 10.1088/1757-899X/187/1/012044

1757-899X/187/1/012044

Abstract

In order to study the influence of the structural parameters of micro thruster applied in micro satellite attitude adjustment and orbital maneuver on its propulsion performance, this paper considers the factors influencing the performance of the thruster, and utilizes the orthogonal test design to obtain nine groups of micro-nozzles with different structural parameters. We processed this series of micro nozzles through MEMS (Micro-Electro-Mechanical Systems) technology. The micro-nozzles are made of single crystal silicon and glass through the anode bonding, and the electric heating wire is creatively processed through MEMS in the thrust chamber to improve the performance of the micro thruster. Experiments were carried out in a vacuum chamber. Finally, we analyse the experimental results by analysis of variance and analysis of range. The experimental results show that the performance of the micro nozzle is optimal when the semi-shrinking angle is 30 degrees, the semi-expansion angle is 15 degrees and the area ratio is 6.22. Meantime, the experiment verifies that it is feasible to improve the propulsive performance of micro-propulsion system through electronic heater strip.

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10.1088/1757-899X/187/1/012044