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Analysis of the influence of inductance and capacitance on film bulk acoustic wave filter

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Published under licence by IOP Publishing Ltd
, , Citation C R Peng et al 2021 IOP Conf. Ser.: Mater. Sci. Eng. 1043 052061 DOI 10.1088/1757-899X/1043/5/052061

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huizhong@uestc.edu.cn

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1 Science and Technology on Electronic Information Control Laboratory, Chengdu, 610036, China

2 School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 611731, China

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1757-899X/1043/5/052061

Abstract

Film bulk acoustic wave (BAW) filter is a kind of new type filter based on MEMS technology. And it has the advantages of high working frequency, simple manufacturing process, small size, integrating and has become a research hotspot in recent years. Compared with surface acoustic wave filter and ceramic dielectric filter, it has higher operating frequency and Q value. In this paper, the working principle of film bulk acoustic wave filter is briefly analysed, and ADS simulation software is used to further explore the influence of inductance and capacitance on its S parameter.

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10.1088/1757-899X/1043/5/052061