Abstract
For evaluations of a mid-infrared (MIR) detectors with antenna, we constructed an angular dependence measurement system of the antenna properties. The fabricated MIR detector consisted of twin slot antennas and a bolometer. The area of the slot antennas was designed to be 2.6 × 0.2 μm2 as to resonate at 61 THz, and they were located parallel and separated 1.6 μm each other. The bolometer was fabricated using by a 7.0-nm thick NbN thin film, and located at the center of the twin antennas. We measured polarization angle dependence and directivity, and showed that the MIR antennas have polarization dependence and directivity like radiofrequency antennas.
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