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Development and approbation of nanoscalpels based probes for atomic force microscopy in the field of plasmonics

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, , Citation M V Zhukov et al 2017 J. Phys.: Conf. Ser. 816 012037 DOI 10.1088/1742-6596/816/1/012037

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cloudjyk@yandex.ru

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1 Department of Material Science and Nanotechnology, ITMO University, 197101 Kronverkskiy pr., 49, Saint-Petersburg, Russian Federation

2 Department of Scanning Probe Microscope and Spectroscopy, Institute of Analytical Instrumentation RAS, 198095 Ivan Chernykh, 31-33, Saint-Petersburg, Russian Federation

3 Laboratory of Renewable Energy Source, St Petersburg Academic University RAS, 194021 Khlopina, 8/3, Saint-Petersburg, Russian Federation

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1742-6596/816/1/012037

Abstract

The formation and approbation of the specialized nanoscalpel (NS) probes were carried out. The possibility of producing diffraction gratings on gold substrates for plasmonics applications was shown. The optimal lithography parameters were revealed by using NS probes. It was shown that NS probes allow improving the lithography results such as the depth and width of the incisions as compared to standard probes.

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10.1088/1742-6596/816/1/012037