Study of the dependence of light ion sputtering yields of carbon-modified surface titanium layers on their thickness

A theoretical sputtering model based on two mechanisms is used in this work to investigate the dependence of light ion sputtering yields of carbon-modified surface titanium layers on their thickness. The model used allows not only to correctly describe the nonlinear dependence of the sputtering yields on the layer thickness, but also to analyze the resulting dependencies. Calculations of the total sputtering yields of helium and hydrogen ions of surface layers of titanium modified with carbon are given in comparison with the results of computer simulations.