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Processes of formation of epitaxial arrays of self-catalytic GaP nanowires on Si (111)

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, , Citation S V Fedina et al 2021 J. Phys.: Conf. Ser. 2103 012127 DOI 10.1088/1742-6596/2103/1/012127

1742-6596/2103/1/012127

Abstract

This study is devoted to the investigation of the effect of growth conditions (growth temperature, values of molecular beam fluxes) on the formation of self-catalytic GaP NW on Si(111), namely surface density, orientation and NW morphology. Nanowire arrays were grown on Si (111) by the plasma-assisted molecular beam epitaxy. It was determined that an increase of the temperature and a decrease of the Ga flux, while maintaining the V/III ratio, reduces the inclined NWs and parasitic islands nucleation probability.

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