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Force/Displacement MEMS Based on Electromagnetic Field Principle for Tiny Insects Monitoring

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, , Citation Jaroslav Hricko et al 2021 J. Phys.: Conf. Ser. 1837 012010 DOI 10.1088/1742-6596/1837/1/012010

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hricko@savbb.sk

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1 Department of Sensoric Systems, Institute of Informatics, Slovak Academy of Sciences, Banska Bystrica, Slovakia

2 Institute of Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Bratislava, Slovakia

3 Department of E-Beam Lithography, Institute of Informatics, Slovak Academy of Sciences, Bratislava, Slovakia

4 Department of Power Mechanical Engineering, National Tsing Hua University, 30013 Hsinchu, Taiwan

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1742-6596/1837/1/012010

Abstract

The novel electromagnetic field principle of a wireless measurement of the small displacement (forces) enables its utilization in a wide range of applications. This paper describes the design and fabrication of the physical model of a one-axis force sensor, but together shows possible applications of the proposed wireless electromagnetic field principle for the compact compliant mechanisms or for tiny insects monitoring.

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10.1088/1742-6596/1837/1/012010