Abstract
White light interferometer (WLI) is one of the common machines that are used to characterizing surface structures. The indication errors of WLI are key metrologic characteristics, which may affect evaluation result of WLI. In this paper, a two-dimensional micro/nano pitch (2D pitch) standard is introduced to calibrate the lateral indication error of WLI. The calibrating experiments are carried out in four measurement positions. The results and the uncertainty is anlysized. And the expanded uncertainty of WLI in lateral measurement (x50) is evaluated as tens of nanometer.
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