Abstract
In this paper, the effects of micro-beam stiffness changes to the dynamic of nonlinear vibrations are investigated. Nonlinear vibrations equation of an actuated micro-beam is derived based on Euler-Bernoulli beam theory. Galerkin method is adopted to simplify the nonlinear equation of the motion. The simpler equation transformed into a dynamical system and its eigen values are analysed. To show the dynamic of the system, the bifurcation and phase plane diagrams are drawn. The numerical result showed that the change of micro-beam stiffness exhibits a Hopf bifurcation.
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