Abstract
We have experimentally investigated the influence of the reactive ion etching (RIE) on the superconducting properties of exfoliated thin films of layered superconductor NbSe2 through transport measurement. Wires with width of 2 μm and 0.5 μm were fabricated from a single NbSe2 film (thickness ~ 65 nm) using RIE with CF4 and O2 gas mixture. While the 2-μm wires did not exhibit any distinguishable degradation in residual resistivity, residual resistance ratio, superconducting transition and current-voltage characteristics in the superconducting state, significant degradation was observed in the 0.5-μm wires.
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