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Design of A Spin-coating Used Manipulator

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Published under licence by IOP Publishing Ltd
, , Citation Zelun Li et al 2019 J. Phys.: Conf. Ser. 1176 052006 DOI 10.1088/1742-6596/1176/5/052006

1742-6596/1176/5/052006

Abstract

A spin-coating used manipulator system is designed, which mainly includes the mechanical system design of coating machine, hardware circuit design and software design of the control system. Operational principle of spin-coating used manipulator in this design can be elaborated as: the manipulator grasps a workpiece to rotate fully in the liquid for coating, the whole process can be controlled by compiled SCM programs, so as to meet different coating demands.

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