Abstract
This paper presents a cheap thin film thickness monitor control unit for piezoelectric crystal heads. The output of the unit is a TTL compatible crystal frequency signal.
L Callegaro, E Puppin and A Sattamino
Published under licence by IOP Publishing Ltd
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Citation L Callegaro et al 1994 Meas. Sci. Technol. 5 1013DOI 10.1088/0957-0233/5/8/023
This paper presents a cheap thin film thickness monitor control unit for piezoelectric crystal heads. The output of the unit is a TTL compatible crystal frequency signal.