Structural, electrical and optical properties of Si delta-doped Al0.27Ga0.73As/GaAs single quantum wells grown by metalorganic chemical vapour deposition

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Published under licence by IOP Publishing Ltd
, , Citation T W Kim et al 1994 Semicond. Sci. Technol. 9 1823 DOI 10.1088/0268-1242/9/10/012

0268-1242/9/10/1823

Abstract

Transmission electron microscopy (TEM), capacitance-voltage (C-V), and photoluminescence (PL) measurements have been performed to characterize the properties of edge delta-doped and centre delta-doped Al0.27Ga0.73As/GaAs single quantum wells grown by metalorganic chemical vapour deposition. Direct observation of the Si delta-doped layer in GaAs quantum wells has been achieved by TEM, and the results of the C-V profiles indicate that the full width half-maximum value of centre delta-doped quantum wells is much narrow than that of edge delta-doped quantum wells. Temperature-dependent PL spectra of centre delta-doped quantum wells show the strong luminescence attributed to the Fermi edge singularity caused by enhanced confinement of carriers by the quantum well.

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10.1088/0268-1242/9/10/012