Abstract
To produce metallic ions, with high charge states, by means of an Electron Beam Ion Source, external ionic injection is required. The working elements are injected, from primary ion source, as low charge state ions.
In the first part of this paper, the different external injection methods are presented, and the main parameters of an ideal EBIS injector are defined. In a second part, several types of primary ion sources are described and their basic features compared to the ideal injector.
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