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REVIEW ARTICLE

Electromigration in integrated circuit conductors

Published under licence by IOP Publishing Ltd
, , Citation J R Lloyd 1999 J. Phys. D: Appl. Phys. 32 R109 DOI 10.1088/0022-3727/32/17/201

0022-3727/32/17/R109

Abstract

The important integrated circuit failure mechanism of electromigration is reviewed. The basic physics of failure is introduced and the concepts of electromigration and thermally induced stresses are discussed. A concept of thermodynamics in a conducting material and the response to non-direct current will be presented.

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10.1088/0022-3727/32/17/201