Fabrication of Gold Nanodot Array Using Anodic Porous Alumina as an Evaporation Mask

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Copyright (c) 1996 The Japan Society of Applied Physics
, , Citation Hideki Masuda Hideki Masuda and Masahiro Satoh Masahiro Satoh 1996 Jpn. J. Appl. Phys. 35 L126 DOI 10.1143/JJAP.35.L126

1347-4065/35/1B/L126

Abstract

A highly ordered gold nanodot array was fabricated by vacuum evaporation using an anodic porous alumina membrane with through-holes of nanometer scale as a mask. This technique resulted in an orderly arrangement of Au dots with a diameter of approximately 40 nm over a large area on a Si substrate.

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