In this paper a version of the extraction of neutral particles from a gas discharge using a gas-distributing disk is proposed, which allows creating a pressure drop between the source volume and the working zone of the vacuum chamber.
The gas distributor ensures a uniform supply of gas to the ionization zone and resonant charge exchange, which will make it possible to achieve uniform combustion of the discharge in the entire volume of the source. Also the gas distributor allows to increase the speed of gas flow, due to pressure drop.
An increase in the rate of gas flow in the volume of the source makes it possible to increase the number of ionization events per unit of time. Consequently, it makes it possible to increase the number of ions generated in the gas discharge, that is, the ionization coefficient of the working gas increases. In turn, an increase in the number of ions generated in the discharge leads to an increase in the number of neutral atoms in the output beam.