Oscillating electric fields in the megahertz range have been studied in a high power impulse magnetron sputtering (HIPIMS) plasma with the use of electric field probe arrays. One possible reason for these oscillations to occur is charge perturbation—or so-called modified two-stream instabilities (MTSIs). It is known that MTSIs give rise to acceleration of the charged plasma species and can give a net transport of electrons across the magnetic field lines. Measurements of these oscillations confirm trends, specifically of the frequency dependence on ion mass and magnetic field strength as expected from the theory of MTSI waves. These results help to explain the previously reported anomalous fast electron transport in HIPIMS discharges, where classical theory of diffusion using collisions to transport electrons has failed.

DC glow discharges were experimentally investigated in atmospheric pressure helium, argon, hydrogen, nitrogen and air. The discharges were characterized by visualization of the discharges and voltage and current measurements for current of up to several milliamperes. Significant differences are seen in the gas temperature; however all the discharges appear to operate as temperature and pressure scaled versions of low pressure discharges. In the normal glow discharges, features such as negative glow, Faraday dark space and positive column regions are clearly observable. In hydrogen and to a lesser degree in helium and argon standing striations of the positive column were visible in the normal glow regime. Normal glow characteristics such as normal current density at the cathode and constant electric field in the positive column are observed although there are some unexplained effects. The emission spectra for each of the discharges were studied. Also the rotational and vibrational...

We present a self-consistent two-dimensional axisymmetric model and simulation strategy to predict radial plasma uniformity in large-area high-frequency (up to 200 MHz) capacitive discharges of argon gas in the pressure range 2–150 mTorr. The model couples Maxwell equations, fluid plasma equations and a sheath model with stochastic heating effects taken into account, solving the equations using the finite element method. Electromagnetic effects (e.g. standing wave and skin effects) as well as the electrostatic edge effect are captured in the simulation, in good agreement with recent experiments. The model highlights differences between the edge effect and the skin effect, both of which can cause strong plasma production near the radial reactor edge. At higher frequencies and high pressures, we observe the 'stop band' where waves are highly damped as they propagate from the discharge edge into the center. We determine the transition from global-to-local power deposition as the pre...

Hydrocarbon nanoparticles with diameters between 10 and 30 nanometres are created in a low pressure plasma combining capacitive and inductive power coupling. The particles are generated in the capacitive phase of the experiment and stay confined in the plasma in the inductive phase. The presence of these embedded particles induces a rotation of a particle-free region (void) around the symmetry axis of the reactor. The phenomenon is analysed using optical emission spectroscopy both line integrated and spatially resolved via an intensified charge coupled device camera. From these data, electron temperatures and densities are deduced. We find that the rotation of the void is driven by a tangential component of the ion drag force induced by an external static magnetic field. Two modes are observed: a fast rotation of the void in the direction opposite to that of the tangential component and a slow rotation in the same direction. The rotation speed decreases linearly with the size of ...

The behavior of dual frequency capacitively coupled plasma discharges (2f-CCP) is experimentally studied by Langmuir probe and rf current measurements and is compared with simulations from the literature. The driving frequency ratio, system pressure, high frequency (HF) power and low frequency (LF) power are varied in the experiments. An increase in LF power causes a moderate increase in electron density but a significant decrease in electron temperature. An increase in HF power causes a strong increase in electron density and populates the high energy part of the electron energy distribution function. These dependences can be explained on the basis of a global model. It is shown that the ratios of HF/LF power and driving frequency are the most important parameters. At integer frequency ratios a significant increase in electron density was found, which is explained by the indirect heating at the plasma series resonance. Several design guidelines are derived which address industri...

Recent developments in laboratory double layers from the late 1980s to the spring of 2007 are reviewed. The paper begins by a lead up to electric double layers in the laboratory. Then an overview of the main double layer devices and properties is presented with an emphasis on current-free double layers. Some of the double layer models and simulations are analysed before giving a more complete description of current-free double layers in radiofrequency plasmas expanding in a diverging magnetic field. Astrophysics double layers are briefly reported. Finally, applications of double layers to the field of plasma processing and electric propulsion are discussed.