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Growth of Nanowires by High-Temperature Glancing Angle Deposition

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Published 15 October 2013 Copyright (c) 2013 The Japan Society of Applied Physics
, , Citation Motofumi Suzuki et al 2013 Jpn. J. Appl. Phys. 52 110116 DOI 10.7567/JJAP.52.110116

1347-4065/52/11R/110116

Abstract

We have demonstrated that nanowires of various metals, Ge, and Ga2O3 can be grown by high-temperature glancing angle deposition (HT-GLAD). The nanowires of metals including Al, Cu, Ag, Au, Mn, Fe, Co, Ni, and Zn are self-catalyzed, while the nanowires of other materials such as Ge and Ga2O3 are catalyzed by Au nanoparticles. However, once the nanowires start to grow, the growth modes of the HT-GLAD nanowires are fundamentally the same, i.e., nanowires with uniform diameter grow only when the vapor is incident at a very high glancing angle and reach a length larger than 1–8 µm even though the number of deposited atoms corresponds to the average thickness of 20–30 nm. This suggests that there is a universal growth mechanism for the nanowires grown by HT-GLAD.

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10.7567/JJAP.52.110116